Air holes turn silicon wafers into flat UV focusing mirrors
Air holes turn silicon wafers into flat UV focusing mirrors for compact optics
Researchers have engineered silicon wafers drilled with tiny air holes that act as flat, reflective metasurfaces for focusing ultraviolet light. The approach, detailed in a 2026 paper on UV Mie-void reflective metasurfaces in silicon, could replace bulky curved optics with compact flat components. The Hacker News discussion links the study and a paywall-free mirror of the phys.org coverage.
UV Mie-void reflective metasurfaces in silicon.
- pfdietz
The application to EUV/XUV is important, as those wavelengths can be very useful for photolithography.
- altairprime
UV Mie-void reflective metasurfaces in silicon (2026) https://doi.org/10.1117/1.AP.9.1.016002
- bookofjoe
https://unwall.app/phys.org/news/2026-11-air-holes-silicon-w...