China Begins Mass Production of Home-Grown Immersion DUV Chipmaking Tools

China begins producing advanced chipmaking deep-ultraviolet lithography machines

Shanghai Aishengna Electronic Technology Group has started mass producing domestically developed immersion deep-ultraviolet lithography machines. This move supports Beijing's semiconductor self-sufficiency goals and offers a fallback if Western export controls tighten. While the new tools require further testing and lag behind ASML's models, they aim to provide Chinese chipmakers like SMIC with an alternative equipment source.

Producing a handful of immersion DUV tools is not the same as producing tools that can be used for high-volume manufacturing, where yield, overlay, throughput and reliability over thousands of wafer runs are what matter.
  1. bobjordan

    After living and working in China 10yrs and fundamentally experiencing the growth rate and culture, it's been a bit horrifying to watch the Western world consistently decide withholding tech from China and giving them no other option but develop their own tech, is a good idea. They are the ultimate long-term planners and I have no doubt the existing gaps will be relatively short lived before China closes them.

  2. rich_sasha

    It doesn't make me upset that China seems able and determined to catch up on the litography technology - what else are they supposed to do?

    What does make me upset is that Europe has the technology and seems unwilling or unable to get it's act together and make some chips. China seems to have managed this part too, only without access to the latest chip making technology!

  3. try-working

    All of this can be traced back to the 2018 blacklisting of ZTE, and the continued willful ignorance of China's capabilities, and of the history of industrialization and technological progress.

  4. AsyncBanana

    China is still far behind modern lithography. It took ASML almost 2 decades to get from immersion DUV (and EUV prototypes) to commercial EUV machines.

  5. toplinesoftsys

    I would not be overestimating this achievement, but not underestimating either. The truth is probably somewhere in the middle. China had access to the latest EUV tech for some time already, so they had abilities to reverse-engineer that tech. Eventually, the verdict will be clear only after we see actual chips produced using these machine, and when we learn their real yield.

  6. maxglute

    Basically game over for compute wars in ~5 years if PRC serious, PRC doesn't need EUV to win compute game. If they hammer DUV tools and commoditize semi (i.e. remove 50-80% margins along every step of supply chain) they will simply be able to sell chips at fraction price of west, even accounting for multi pattern inefficiencies. TCO may still swing leading edge favor depending on infra / energy price, but as far as compute race goes, PRC can hammer power, fabs, DCs all at much lower input costs. The bottleneck has always been semi tooling.

  7. ck2

    nvidia clone in next year or two?

    btw photo on that article is actually intel at Oregon

  8. brcmthrowaway

    How does this compare to EUV?

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2026-08-02